Grid:
All
Grid-14
Grid-12
Axis:
All
X
Y
Grid
↕
Sel
↕
Axis
↕
FWHM (nm)
↕
FWHM/2 (nm)
↕
nm/px = 0.94 · FWHM/2 represents the half-width of the edge transition, comparable to the SEM beam spot size.