Appendix: EBL schematic

Beam line optics diagram
Figure 3.5: Beam line optics.

Reference

Pimpin, Alongkorn & Srituravanich, Werayut. (2012). Review on Micro- and Nanolithography Techniques and Their Applications. Engineering Journal. 16. 37-56. 10.4186/ej.2012.16.1.37.

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Process
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Substrate
Resist
PBW
Develop
Metal
Analysis